United States

This talk will review applications of the Cs+ Low Temperature Ion Source (LoTIS). This ion source enables high precision FIB imaging and machining, and also high-yield secondary ion mass spectrometry (SIMS)

EIPBN 2021

Applications of the Cesium Low Temperature Ion Source

sims

ion source

The Electronic Materials Conference (EMC) is the premier annual forum on the preparation, characterization and use of electronic materials. This year’s event will feature a plenary session, topical sessions, a poster session and more.

EMC is coordinated with the Device Research Conference (DRC), which will be held during the same week, from June 20-23. This recognizes the strong interaction between device and electronic materials research and provides fruitful exchange of information between attendees of both Conferences.

![](https://assets.underline.io/uploads/markdown_image/1/image/eb26c24a18d5d1030616afa4f993cf89.png)
	
<a href="https://www.mrs.org/docs/default-source/meetings-events/mrs-conference-services/2021/emc-2021/2021-emc-program-at-a-glance-6-16-21.pdf?sfvrsn=e39f950c_4">Latest Program-at-a-Glance</a>

<a href="https://drive.google.com/file/d/1eiS1ao4p83VNy8xgHs3Rls7gTQjx7Rc4/view?usp=sharing">Full Program with Abstracts</a>

EMC 2021

invited talk

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

To register for this event, please follow the link below.

We investigate the surface wetting properties for a range of micro/nanofabricated topography on aluminium surfaces supported by ion-beam processing to enhance liquid-solid interaction.

Surface Wetting on Micro-milled or Laser-Etched Aluminium with Ion-Beam Post-Processing

This work presents the analysis of spike, burst, and network burst activity in a microfluidic brain-on-chip. A collection of activities in the electrophysiological recordings, measured by multielectrode arrays, provided strong clues for the maintenance of human induced pluripotent stem cells-derived cortical neuron cultures in 3D for 37 days.

Detection of network burst activity in a MEMS-based 3D neuronal cell culture system

This work explored an accessible and cost-effective way to prepare high quality 2D Bi and derivatives on SiO2/Si substrates by e-beam evaporation. The electrical and thermoelectric properties were characterized. Our study builds a platform to realize high-quality 2D Bi, which may also be suitable in other Xenes.

Tuning Electrical Properties of E-beam Evaporated 2D Bi and Derivatives

In this study, we investigated whether UV-cured resin thin films modified by atomic layer deposition (ALD) could be removed completely by dry etching procedures. UV-nanoimprinted deposition masks were removed completely by sequential physical and chemical dry etching procedures, to demonstrate and area selective deposition of aluminum oxide.

Nanoimprinted Deposition Masks for Area Selective Atomic Layer Deposition of Aluminum Oxide

Long silver rods SERS layer was constructed by using fine grit (1µm) sandpaper as a template for imprinting nano-patterns. Therefore, costly nano lithographic processing was avoided. Raman spectra of R6G were obtained. The signal strength decreased linearly at reduced concentrations in logarithmic scale, as expected for SERS, down to 1nM.

 Low Cost Nano Imprint for Surface Enhanced Raman Scattering

In this work, we apply multilayer etching mask and optimize the etch process to improve etching rate and etching selectivity to pattern sapphire antireflection nanostructures. Initial results show 2-D sapphire nanostructures with 530 nm width and 470 nm height, resulting in two-fold aspect ratio enhancement over previous work.

Plasma Etching of High Aspect ratio Sapphire Antireflection Nanostructures Using Multilayer Etching Mask

Plasmonic biosensors have been attracted growing attentions in recent years because of their unique properties of high sensitivity, label-free operation, and suitable for high-throughput real-time detection. Here, we proposed a facile, use-friendly and cost-effective image-based plasmonic biosensor to detect the concentration of various biomolecule.

Nanotransfer printing of plasmonic nanostructures on convex lens for highly sensitive image-based biosensing

Optical metasurfaces have emerged as potential candidates for next generation optical devices due to their ability to manipulate the amplitude, phase, wavenumber, and polarization of light1. They are two dimensional subwavelength structures which are engineered to abruptly impart a desired property shift to the impinging optical wavefront. Huygens metasurfaces comprise of an array of optical resonators where each resonator acts as a point source causing light to propagate in the forward direction. In our work, these metasurfaces are made using vanadium dioxide, which was chosen as a good candidate because it exhibits a reversible metal-insulator transition above 68oC. Vanadium dioxide is known for its thermochromic property, making it a promising material for smart energy-saving windows2. In this report, we present a bottom-up fabrication process for vanadium dioxide metasurfaces useful for optical modulation at short wave infrared wavelengths (SWIR). Thin films of vanadium dioxide are fabricated using pulsed laser ablation of a vanadium pentoxide target on a quartz substrate. This is done using a KrF excimer laser while flowing oxygen gas into the vacuum chamber during ablation. Electron-sensitive resist (PMMA) is spun on the film and functions as a stencil for patterning using electron beam lithography. Different hard masks have been used to achieve etched features that closely match geometries designed using finite element analysis for specific behaviors. We present results of fabricated nanoantennas using fluorine- and chlorine-based etch processes. We propose that chlorine-based etch recipes are preferred in order to achieve good anisotropy and accurate nanoscale dimensions for optical device applications.

Fabrication of Dynamically Tunable Vanadium Dioxide Huygens Metasurfaces for Optical Modulation

Electrochemical methods have stood out as the most promising since they can detect liquid-phase explosives. Moreover, they are simple, inexpensive, suitable for portable sensors, work at ambient conditions, and have high sensitivity and selectivity for nitro-compound.

Amperometric detection of nitro compounds using novel nanomaterial composite

In this work, a geometric model was developed using line-by-line assembly of non-monodispersed binary nanoparticles to obtain a randomly closed packed assembly structure. To validate the results from the script, a binary nanoparticle assembly was experimentally fabricated. The experimental and simulated FFT peak frequencies were compare.

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Surface Wetting on Micro-milled or Laser-Etched Aluminium with Ion-Beam Post-Processing

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Next from EIPBN 2021

Surface Wetting on Micro-milled or Laser-Etched Aluminium with Ion-Beam Post-Processing

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Microwave-Induced Annealing, Its Impact on Mg Diffusion and Photoluminescence Activity in Implanted and In Situ Doped GaN

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